Temperature of vacuum plated film is controlled

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  • source:LENA CNC Machining
One, temperature of temperature control demand is all chemical reaction important parameter, spend control of film, temperature, its importance in reaction type plated film, optics especially, it is a hand more Qu Yi points to. According to make Cheng demand actually, have the dominates means plan that writes distinct range and precision, the progress because of CPU, make temperature controller, enter completely already. Computerization times, does at the temperature in PVD equipment control application reach a requirement following: ?  of v/LIT an amphora-like jar of Cheng of Pu of the Piao that show flesh throws τ every Piao to attack ＋ of ℃ of?0~80 of  Yun δ - 5% plastic base material remove water except hydrosphere housing 1.

Many bits of set is started 2.

Autotuning180~250 ℃ ＋ - 5% metals base material is improved character except hydrosphere film 1.

Many bits of set is started 2.

Autotuning3.

Multistage ＋ of control 250~380 ℃ - plated film of base material of 3% optical glass 1.

Many bits of set is started 2.

Autotuning3.

Remote D/A, a/D4.

Multistage ＋ of control 400~750 ℃ - plated film of 1% reaction type 1.

Many bits of set is started 2.

Autotuning3.

Remote D/A, a/D4.

Multistage control 2, the character that controls a target wants good temperature control, in the choice systematic component and control means must know control object character adequately first. 3, temperature control system is comprised 4, component of temperature control system and heater of function component function (IR, Micro Heater) add heat source thermoscope (thermocouple) Thermal Couple passes on heater temperature position operator (SCR or SSR) electric power adjusts temperature controller set and show with control 5, temperature is controlled.

ON, OFF means: ? Cell of power of Yu Elay semiconductor is comprised 2.

PID type: ? Yu RAIC or SCR are comprised 3.

Section type: ? The means of principle PID control that circle of room of β of  Si  irrigates  to wring temperature of ID of  of  of charming Piao screen to control is current equipment of vacuum plated film is the most commonly used means, its control a principle, like adjusting gas ingle with hand control like the person, see temperature is elevatory fast, reduce firepower at once, along with write correction firepower to require temperature in order to hold place. Alleged PID is by P (the scale width of the error) I (integral) D (differential) 3 controller composition. 1.

Proportional Bamd:PIt is a center with set point, build the temperature of stand at attention, negative limits to take, in this temperature belt, change temperature so with increase or reducing heat addition, make supply heat source to maintain range needs in place inside, its function can reduce systematic time number to reach controlled the static gain of content. For example: ? Bao set → 2.

5 ％ , set temperature 200 ℃ , × of ℃ of =200 of temperature control limits 2.

When 5%=5 ℃ is like temperature to be 202 ℃ , lukewarm accuse implement adjust when if temperature is 199 ℃ ,Power outputs =50%-50% × 2/5=30% , lukewarm accuse implement adjust 50% × of ＋ of Power output =50% 1/5=60% 2.

Integral:II function is right the error takes the integral about time, increase along with time, integral can increase, and make controller output increases, make the error falls then to 0. For example: When P=2.

5, set temperature 200 ℃ , when I=1 is like temperature to be 202 ℃ , lukewarm accuse implement adjust 2 ℃ of × of ℃ of Power output =1%/ =2%Power=50%-2%=48% already with minutely fall 2% Power electric power 3.

Derivative=D this function basically is to improve the reaction lag character of component to use forecast error change to lead, happen in order to had avoided strong appearance, main function is the response of the faze outside rapid improvement. When P set 5, temperature set 200 ℃ I=1.

0D set 2 when when temperature =202 ℃ , PI controls means to divide Power to drop with 2%/ , and PD controls fashion, divide × 2 minutes with 2%/ =4%power drops. 7, epilogue PID is lukewarm accuse means to apply extensively already in vacuum equipment old, along with write equipment to reach fine of stability demand day to precision, traditional PID blemish also is shown increasingly, main problem is PID parameter set the value is in whole control process is changeless, the chaos outside causing is respondent reach a goal the value is respondent hard give attention to two or morethings, because this intelligence PID is controlled,go out with respect to application. Intelligent PID is controlled even if guide the expert fastens technology of network of control of all, Fuzzy, nerve, make controller has suit oneself, PID parameter does not count mathematical model and but real time online adjust, to systematic parameter change has better hard usage sex. CNC Milling